Dictionary of Electrical Engineering

Commonly used terms in the Electrical industry.

(1) a device used for scanning written documents or printed pictures by tracing light along a series of many closely spaced parallel lines.

(2) any device that deflects a light beam through a range of angles, using mechanisms such as diffraction from electro-optic or acousto-optic gratings or mechanical deflectors.

(3) a type of projection printing tool whereby the mask and the wafer are scanned past the small field of the optical system that is projecting the image of the mask onto the wafer.