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Commonly used terms in the Electrical industry.
coherent illumination
a type of illumination resulting from a point source of light that illuminates the mask with light from only one direction. This is more correctly called "spatially coherent illumination."
equivalent sphere illumination (ESI)
the level of sphere illumination that would produce task visibility equivalent to that produced by a specific lighting environment.
illumination
(1) in vision science, the amount of light per unit area delivered to a surface and accounting for the spectral sensitivity of the human eye.
(2) informally, the amount of light falling on an object. Also called illuminance. See also luminance.
(3) the effect of a visible radiation flux received on a given surface. Illumination is measured by the illuminance, which is the luminous flux received by surface unit, usually expressed in lux. One lux equals 1 lumen/m
2
.
illumination system
the light source and optical system designed to illuminate the mask for the purpose of forming an image on the wafer.
incoherent illumination
a type of illumination resulting from an infinitely large source of light that illuminates the mask with light from all possible directions. This is more correctly called spatially incoherent illumination.
off-axis illumination
illumination that has no on-axis component, i.e., that has no light which is normally incident on the mask. Examples of off-axis illumination include annular and quadrupole illumination.