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Commonly used terms in the Electrical industry.
coherent illumination
a type of illumination resulting from a point source of light that illuminates the mask with light from only one direction. This is more correctly called "spatially coherent illumination."
incoherent illumination
a type of illumination resulting from an infinitely large source of light that illuminates the mask with light from all possible directions. This is more correctly called spatially incoherent illumination.